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Manufacturer: AIXTRON
Model: AIX2800G4 HT
Description: GaN MOCVD
Version: 2 INCH x 42, 4 INCH x 11, 6 INCH x 6
Year: 01.11.2010
Quantity: 1

-Still installed in the fab.
-Shut down and powered off.
-Can be inspected by appointment

-serial number is 1001-701155
-The equipment is in excellent condition, with no missing parts.
-The equipment was lightly used in an R and D environment for around 2-3 years.
-The equipment ran 4 inch Sapphire wafers

-For the detailed configuration and the gas panel configuration, please refer to the attached photos and PDFs.

Maker AIXTRON Model AIX2800G4 HT

Acquisition Date 2011-10-10 Q’ty 5 EA

Capacity : 6"×6 or 4"×11 or 2"×24

Susceptor dimension : D520mm×T19mm

Chamber coil (9 channels)

Hydride Line : 1xNH3, 2xDopant

Purifier : H2, N2, NH3

Pump : DOR pump(SH-110), Ebara pump(ESA70)

With:

H2 Purifier (IN LINE Type)

Maker TERATECH

Model TPH-LP-500S(100S)

Gas : Hydrogen

Process Methods : Line Purifire

Flow Rate(Nm³/hr) : 10.30.50.75.100.150.300

Impurities Removed : H₂.O₂.H₂O.CO.CO₂



Categories: LED Manufacturing Equipment, FAB MOCVD

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