In this video, our polisher product manager Scott Gruenke presents to you our slurry flow monitor upgrade for the Applied Materials Mirra platform. This system installs non-invasively and integrates seamlessly with your Mirra polisher to provide reliable flow monitoring of slurry within the tool. Please reach out for additional information or a quote!
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Contact Information
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Information: info@entrepix.com
Sales: sales@entrepix.com
Spare Parts: parts@entrepix.com
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About Us
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Entrepix, Inc. serves the semiconductor and related industries as a leading provider of chemical mechanical polishing (CMP) production, integration and optimization services to IDMs, OEMs, MEMS, nanotechnology and CMP consumables suppliers. We produce new and innovative equipment like our DSS-200 cleaning systems and head tester, as well as renew technology for existing and emerging CMP users by refurbishing semiconductor equipment, upgrading featuresets of a variety of wafer processing tools, or adapting the equipment for use in novel applications, such as airbag sensors and photovoltaics. As a technology renewal partner, Entrepix enables long-term, reliable, predictable and cost-effective performance of your equipment. Headquartered in Phoenix, Arizona, USA, Entrepix operates a 38,000 square foot facility housing its CMP foundry and equipment manufacturing facilities.
