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Title: MEMS Real-Time Clocks Based on Epitaxial Polysilicon: System-Level Requirements and Experimental Characterization
Author: Giorgio Mussi{1}, Paolo Frigerio{1}, Gabriele Gattere{2}, Giacomo Langfelder{1}
Affiliation: {1}Polytechnic University of Milan, Italy; {2}STMicroelectronics, Italy
Abstract: This paper assesses the feasibility of MEMS-based real-time clocks using polysilicon without correcting the temperature coefficient of frequency (TCf) through dedicated technological steps. A large TCf (-30 ppm/K) is not an issue in terms of maximum frequency compensation: indeed, the dominant part of the frequency correction, to match the 32-kHz target, is demanded by etching-induced frequency offsets. This sets the required bits of the modulator/divider that performs the compensation. Instead, requirements in the bits and refresh rate of the temperature sensor are affected by large TCfs. Nevertheless, this work predicts and demonstrates few ppm stability, making the approach quite competitive.
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