This video was recorded in 2013 and posted in 2021
Sponsored by IEEE Sensors Council ([ Ссылка ])
Title: Quantifying Modal Shapes in Smart Piezoelectric Ultrasonic Transducer Array: Modeling and Experiment
Author: M.A. Matin{1}, K. Ozaki{2}, Y. Numata{2}, D. Akai{2}, K. Sawada{2}, M. Ishida{2}
Affiliation: {1}Bangladesh University of Engineering and Technology, Bangladesh; {2}Toyohashi University of Technology, Japan
Abstract: In this paper, a novel technique has been developed to quantify modal shapes in piezoelecric functional thin films-based micromachined ultrasonic transducers (pMUTs). To obtain high sensitivity, an array of smart pMUTs is designed and successfully fabricated using epitaxially grown functional eutectic Pb(Zr0.52Ti0.48)O3 (PZT) thin film on Si(111)/gamma-Al2O3(111)/SrRuO3(111) substrates. The characterization is performed employing advanced 3D finite element modeling taking crystallographic anisotropy into account and Laser Doppler Vibratometer (LDV) measurement system. An excellent correlation is realized between different mode shapes and resonance frequencies in computation and experiment. The geometry and size of the diaphragm of pMUTs were varied and computation was conducted to extract eigenfrequency and modal shape. Utilizing the correlation results, ultrasonic wave transmitting experiment was successfully carried out using fabricated pMUTs as a transmitter and a commercial PZT hydrophone as receiver.
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