Brooks Instrument explains the principle of operation behind our thermal mass flow meter from our SLA Series. The SLA Series has gain broad acceptance as the standard for accuracy, stability, and reliability.
As gas flow enters the thermal mass flow meter, a laminar flow element diverts a precise portion of the gas to pass through the thermal sensor, the heart of the thermal mass flow meter. The thermal sensor consists of a bypass tube fitted with a heater element, an upstream temperature sensor, and a downstream temperature sensor. As the gas flows through the bypass tube, the sensors measure the temperature differential between the gas entering the tube and exiting the tube within the thermal mass flow meter.
When considering a thermal mass flow meter, Brooks Instrument has a superior zero stability specification, indicating that it can maintain accuracy over time. Good sensor stability ensures that the thermal flow meter delivers highly accurate and consistent results with less frequent re-calibration. A stable accurate sensor guarantees stable, accurate process control.
Once the temperature differential is measured, a signal is sent to the circuit board, interpreting the data into flow output and compares it to the setpoint received from the user’s setpoint signal. If the setpoint is higher than the measured flow output, the controller will open the control valve allowing more gas flow through. If the setpoint is lower than the measured gas flow output, the controller will close the control valve decreasing flow.
When evaluating a thermal mass flow meter, choose Brooks Instrument SLA Series for its stable, accurate process results.
00:00 Who is Brooks Instrument
00:10 How to Apply Power to a Thermal Mass Flow Meter
00:24 The Basic Construction of a Thermal Mass Flow Meter
00:35 A Precise Portion of the Gas Flow is Diverted Through a Laminar Flow Element
00:56 Thermal Sensor Measures the Temperature Differential
01:08 Thermal Mass Flow Meter Superior Sensor Stability
01:37 How Process Gas Flow is Measured
02:17 Thermal Mass Flow Meter Circuit Board
02:34 What are Advanced Alarms & Diagnostics
For more information on our thermal mass flow meters, visit: [ Ссылка ]
Who we are:
Since 1946, Brooks Instrument has been a leader in precision fluid measurement and control technology. Providing instrumentation for flow, pressure and vapor delivery, the company serves customers in semiconductor and high-tech manufacturing, laboratories and other processes and industries. With manufacturing, sales and service locations in the Americas, Europe and Asia, Brooks Instrument has the world’s largest installed base of mass flow controllers.
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