Title: Air-Coupled Ultrasonic Rangefinder with Meter-Long Detection Range Based on a Dual-Electrode PMUT Fabricated Using a Multi-User MEMS Process
Author: Suresh Alasatri{1}, Ko Lok Mak{1}, Jad Benserhir{1}, Joshua En-Yuan Lee{1}, Libor Rufer{2}
Affiliation: {1}City University of Hong Kong, Hong Kong; {2}University of Grenoble Alpes, France


Abstract: This work demonstrates the feasibility of realizing an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducers (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.

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