The accurate and precise measurement of pressure and vacuum is critical to the maintenance of control over many of the fabrication processes in the production of electronic, photovoltaic, and other semiconductor devices.

This video contains an overview of the different measurement systems and metrics in common use for the measurement of pressure and vacuum. The different types of instrumentation appropriate for pressure/vacuum measurement have been described and compared with each other. Capacitance manometers have been examined in detail and found to be the most accurate and repeatable measurement devices currently available.

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About MKS Instruments
MKS Instruments is a global provider of instruments, systems, subsystems and process control solutions that measure, monitor, deliver, analyze, power and control critical parameters of advanced manufacturing processes to improve process performance and productivity for our customers. Additional information can be found at www.mksinst.com.

MKS Instruments, Inc.
2 Tech Drive, Suite 201
Andover, Massachusetts 01810
USA

Tel: 978-645-5500
Fax: 978-557-5100
mks@mksinst.com
www.mksinst.com

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