MEMS Pressure Sensor alternate to BOSCH BMP280
●Supply Voltage: 2V to 5.5V
●Operating Temperature Range: -40°C to +85°C
●Pressure Accuracy: Less than±0.4kPa (Less than±4.0mbar) @ 25°C
●Temperature Accuracy: ±1.0°C
●Altitude Resolution Better Than 1.0 meter (50cm) in Active Mode
●Size 2.5 x 2 x 1mm (w x l x h)
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What is MEMS pressure sensor?
A MEMS (Micro-Electro-Mechanical Systems) pressure sensor is a type of sensor that uses microfabrication technology to create miniature devices capable of measuring pressure. Here’s a breakdown of how it works and its key features:
How MEMS Pressure Sensors Work?
Structure:
Micro-Mechanical Components: MEMS pressure sensors consist of tiny mechanical components, such as diaphragms or beams, that deform in response to pressure changes. These components are fabricated using semiconductor processes similar to those used in integrated circuits.
Sensing Element: The sensing element, often a diaphragm or a cantilever beam, deflects when pressure is applied. The amount of deflection is proportional to the pressure applied.
Measurement Principle:
Capacitive: In capacitive MEMS pressure sensors, the diaphragm forms one plate of a capacitor, with another fixed plate separated by a small gap. As pressure changes, the diaphragm deflects, altering the capacitance between the plates. This change in capacitance is measured and correlated to pressure.
Piezoelectric: Some MEMS sensors use piezoelectric materials that generate an electrical charge in response to mechanical stress. The amount of charge produced correlates to the pressure applied.
Resistive: In resistive MEMS pressure sensors, strain gauges are integrated into the diaphragm. As the diaphragm deforms due to pressure changes, the strain alters the resistance of the strain gauges. This change in resistance is measured and related to the pressure.
Signal Processing:
Analog/Digital Conversion: The mechanical deformation is converted into an electrical signal, which is then processed. This can involve amplification, filtering, and analog-to-digital conversion, depending on the design of the sensor.
Output:
Pressure Data: The processed signal is used to determine the pressure value, which can be output in various formats, such as analog voltage or digital data, depending on the sensor’s design.
Key Features of MEMS Pressure Sensors
Miniaturization: MEMS technology allows for very small sensors that can be integrated into compact systems, making them suitable for applications where space is limited.
High Sensitivity: MEMS sensors are known for their high sensitivity and accuracy, which makes them suitable for precise pressure measurements.
Low Power Consumption: MEMS sensors typically consume very little power, which is advantageous for battery-operated or portable devices.
Cost-Effective: Due to the use of semiconductor fabrication techniques, MEMS sensors can be produced at a lower cost compared to traditional pressure sensors.
Robustness: MEMS sensors are often more robust and can operate in a range of environmental conditions, making them suitable for automotive, industrial, and consumer electronics applications.
Applications
Consumer Electronics: Used in devices like smartphones for pressure sensing in applications such as barometers and altimeters.
Automotive: Utilized for monitoring tire pressure, engine performance, and various other parameters.
Medical Devices: Employed in medical equipment for monitoring blood pressure and other physiological measurements.
Industrial: Used in various industrial processes for monitoring and controlling pressure in systems like HVAC, fluid management, and process control.
MEMS pressure sensors represent a sophisticated technology that integrates mechanical and electrical systems at a microscale, providing accurate and reliable pressure measurement in a variety of applications.
