Today's video highlights a crucial technology in China's semiconductor industry - lithography machines, especially immersion DUV lithography machines. Lithography machines hold a pivotal position in chip manufacturing, with their precision and efficiency directly impacting the technological level and capacity of chips. Currently, the most advanced lithography machines globally are the EUV lithography machines from the Dutch company ASML. Due to various reasons, China faces challenges in purchasing EUV lithography machines and relies on DUV lithography machines, especially immersion ones. Immersion DUV lithography machines play a vital role in China's chip industry, capable of producing 7nm and even 5nm chips, representing one of the most advanced technological levels globally. Due to export control regulations, ASML might face challenges in supplying NXT:2000i and higher immersion devices to China, potentially causing supply chain issues. The latest two immersion DUV lithography machines may not be sold to mainland China. ASML's financial report indicates that China has become its second-largest market. This signifies significant demand in China for ASML lithography machines, but export controls from the United States may impact the Chinese market. China has procured a substantial number of immersion DUV lithography machines, and domestic company AMEC has successfully developed dry DUV lithography machines while working on immersion DUV lithography machines. This demonstrates China's strategic plans and investments in developing the domestic lithography machine industry to reduce dependence on imports. Immersion DUV lithography machines can manufacture 5nm chips, and while costs may rise, it is a feasible approach to propel the chip industry to smaller process nodes. Lin Benjian, the father of immersion lithography, believes advancing to 5nm is feasible with more exposures, even if it results in increased costs. Recent media reports reveal that the Dutch lithography giant ASML disclosed a €6.4 billion order from China, securing its position as the second-largest market globally!
As everyone in China knows, lithography machines are one of the core and expensive devices in the chip manufacturing process. Their role is to project the circuit pattern of the chip onto a silicon wafer using light. The precision and efficiency of lithography machines directly determine the technological level and capacity of chips. Currently, the most advanced lithography machine globally is the EUV lithography machine from the Dutch company ASML, capable of manufacturing chips below 7nm, even down to 3nm. However, mainland China faces challenges in acquiring EUV lithography machines, creating a gap in China's semiconductor industry.
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