This is an RF Plasma chamber using either Nitrogen or Oxygen. The RF Antenna produces a high EM field which produces IONs from the gas and in turn a plasma. Nitrogen is reddish in color and Oxygen blue. This chamber is at a moderate vacuum of only 2 x 10^-2 Torr so a conventional rotary pump is all that was needed.
The plate below the antenna will hold samples for ion implantation to modify the surface properties of the sample material.
