More: [ Ссылка ] The MiQA Multi-Axis Motion System – X-ray Microscopy & Quality Assurance of Optical Elements 56-Axes, 20 Tons, Nanometer Precision.
MiQA is a 20-ton, 56-axis motion system of extraordinary precision, designed for beam lines around synchrotrons and will be used for x-ray microscopy and quality assurance of x-ray optics such as lenses. The system is equipped with 56 motors 16 controllers, 7 air bearing granite sliders and has an overall mass of more than 20,000 kilograms for moving and positioning small elements with the weight of only a few grams. In order to achieve this performance, the entire spectrum of PI’s precision technologies is put to use.

Precision Automation Solutions [ Ссылка ]
Integrated Spectrum of Precision Technologies - Standard & Custom
In addition to integrating and networking standard components, the challenging specifications required customized developments such as an oval hexapod 6-axis parallel positioner, with 6 additional measuring legs for the highest levels of precision
The detector stage is a custom a kinematic motion system capable of moving payload larger than 100kg in 3 DoF with less than 500nm resolution.
During experiments the sample is fixed on top of the center stage. For sample characterization it is essentially important to achieve highest positioning stability in space.

Tomography Mode: 85nm Sphere of Confustion
When operated in “Tomography Mode” the samples point of interest stays inside a spherical space with the diameter of 85 nanometers while the rotation stage turns over 360-degrees.

Ovali Hexapod
The so-called Ovali Hexapod the basic kinematic machine of the sample stage. Among other things it is used to move the entire sample up out of the x-ray beam to generate a reference image and afterwards to return to the previous position. This takes place with the repeatability of better than 200 nanometers, an extraordinary result for this payload class. More: www.pi-usa.us/blog/novel-sample-stage-alignment-hexapod-for-x-ray-microscopy-and-tomography/

Software and Control Technology
The system architecture consisting of 16 controllers coordinates all operating status and all individual positions of all axes at any time. The system provides virtual coordinate system capabilities, configurable independently of the alignment of the station to the X-ray beam. Features like this make operation of complex technology easy. More: [ Ссылка ]

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