Title: Piezoelectric Scanning Micromirror with Built-in Sensors Based on Thin Film Aluminum Nitride
Author: Katja Meinel{1}, Chris Stoeckel{2}, Marcel Melzer{1}, Sven Zimmermann{2}, Roman Forke{3}, Karla Hiller{2}, Thomas Otto{2}
Affiliation: {1}Chemnitz University of Technology, Germany; {2}Chemnitz University of Technology, Fraunhofer Institute for Electronic Nano Systems, Germany; {3}Fraunhofer Institute for Electronic Nano Systems, Germany
Abstract: A micromirror with piezoelectric thin film aluminum nitride (AlN) as transducer material for actuation and detection is presented. Four sensor elements are integrated for closed-loop monitoring of the resonant driven microscanner with an entire footprint of 6 mm². The sensor and actuator elements are monolithically fabricated in a 150 mm SOI technology. A large optical scan angle of 78.1° at 3.403 kHz and 10 V actuation voltage is achieved. The sensor signal is in linear relation to the deflection. A dynamic angle sensitivity of 48.4 fC/° is reached.
